A method of manufacturing a current collector of an energy storage device includes the following steps: providing a substrate; and using a microwave plasma chemical vapor deposition process to form a modification layer on the substrate. The modified layer includes nanographene, and a thickness of the modified layer is 1 nanometer to 500 nanometers. In the microwave plasma chemical vapor deposition process, a microwave frequency is 300 MHz to 300 GHz, a microwave power is 500 watts to 75,000 watts, a temperature is 25oC to 600oC, and a deposition time is less than 30 minutes. The microwave plasma chemical vapor deposition process includes the following steps: passing inert gas or stable; passing hydrocarbon gas and hydrogen; applying microwave to generate plasma; ionizing the hydrocarbon gas and the hydrogen; and forming nanographene on the substrate. |