| 專利名稱(中) | 微型常閉式結構及其製作方法 |
| 專利名稱(英) | Micro Normally-closed Structure and Method for Manufacturing the same |
| 專利家族 |
美國:10,077,185 |
| 專利權人 | 國立清華大學 100.00% |
| 發明人 | 賴威成,方維倫 |
| 技術領域 | 電子電機,機械結構 |
| The present invention relates to a micro normally-closed structure, which is manufactured by a MEMS process and used as a MEMS component. The structure includes a base and a fixed contact; and a flexible arm including a first end and a movable contact, wherein the first end is electrically connecting to the base, and remaining a normally closed electrically conducting state between the movable contact and the fix end. |
| 承辦人姓名 | 李馥如 |
| 承辦人電話 | 03-5715131 #34576 |
| 承辦人Email | fujulee@mx.nthu.edu.tw |