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專利授權區


專利授權區
專利名稱(英) Method for Preparing IGZO Particles and Method for Preparing IGZO Film by Using the IGZO Particles
專利家族 中華民國:I415794
美國:8,278,140
專利權人 國立清華大學 100%
發明人 周更生,高振裕,楊雅惠,楊士禮
技術領域 材料化工
專利摘要(中)
A method for preparing IGZO particles and a method for preparing an IGZO thin film by using the IGZO particles are disclosed. The method for preparing the IGZO particles comprises the following steps: (A) providing a solution of metal acid salts, which contains a zinc salt, an indium salt, and a gallium salt; (B) mixing the solution of the metal acid salts with a basic solution to obtain an oxide precursor; and (C) heating the oxide precursor to obtain IGZO particles.
聯絡資訊
承辦人姓名 鍾弦靜
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