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專利授權區
專利名稱(中)	用於電子顯微鏡的測試樣品及其製作方法
專利名稱(英)	ELECTRON MICROSCOPIC SPECIMEN, AND METHODS FOR PREPARING AND PERFORMING MICROSCOPIC EXAMINATION OF THE SAME
專利家族	中華民國：I752679 大陸：CN114441561B 美國：US11227742B1
專利權人	國立清華大學 100%
發明人	陳健群,彭裕庭
技術領域	材料化工,機械結構,光電光學,電子電機

專利摘要(英)
An electron microscopic specimen includes a carrier for an electron microscope, an object, and a protective layer. The object is adapted for microscopic examination using the electron microscope, and is disposed on a surface of the carrier. The protective layer is made from amorphous aluminium oxide, and is disposed over the object, such that the object is enclosed between the carrier and the protective layer. The protective layer has a thickness not greater than 5 nm. A method of making the electron microscopic specimen, and a method for microscopic examination of the specimen are also disclosed.

專利摘要(英)

An electron microscopic specimen includes a carrier for an electron microscope, an object, and a protective layer. The object is adapted for microscopic examination using the electron microscope, and is disposed on a surface of the carrier. The protective layer is made from amorphous aluminium oxide, and is disposed over the object, such that the object is enclosed between the carrier and the protective layer. The protective layer has a thickness not greater than 5 nm. A method of making the electron microscopic specimen, and a method for microscopic examination of the specimen are also disclosed.

聯絡資訊
承辦人姓名	楊美茹
承辦人電話	03-5715131 #62305
承辦人Email	mjyang2@mx.nthu.edu.tw