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專利授權區
專利名稱(中)	極紫外光光譜橢偏儀
專利名稱(英)	EUV SPECTROSCOPIC POLARIMETER
專利家族	中華民國：I780700 美國：11,313,727
專利權人	國立清華大學 100.00%
發明人	陳明彰,張光佑,黃旆齊
技術領域	材料化工,能源科技,光電光學,電子電機

專利摘要(中)
本揭示內容提供一種極紫外光光譜橢偏儀，其包含光源接收元件、第一極化調變元件、第二極化調變元件、能量分離元件以及光感測與分析裝置。光源接收元件用以接收目標光源。第一極化調變元件可旋轉地連接於光源接收元件，並產生一第一極化光。第二極化調變元件可旋轉地連接於第一極化調變元件藉以產生一第二極化光。能量分離元件用以接收第二極化光以產生一極化調變與能量解析光。光感測與分析裝置用以接收極化調變與能量解析光並提供光譜及偏振資訊，其中光譜及偏振資訊包含至少一能量資訊。藉此，有助於量測目標光源光譜偏振資訊。

專利摘要(中)

本揭示內容提供一種極紫外光光譜橢偏儀，其包含光源接收元件、第一極化調變元件、第二極化調變元件、能量分離元件以及光感測與分析裝置。光源接收元件用以接收目標光源。第一極化調變元件可旋轉地連接於光源接收元件，並產生一第一極化光。第二極化調變元件可旋轉地連接於第一極化調變元件藉以產生一第二極化光。能量分離元件用以接收第二極化光以產生一極化調變與能量解析光。光感測與分析裝置用以接收極化調變與能量解析光並提供光譜及偏振資訊，其中光譜及偏振資訊包含至少一能量資訊。藉此，有助於量測目標光源光譜偏振資訊。

專利摘要(英)
An EUV spectroscopic polarimeter including a light receiving element, a first polarizing modulation element, a second polarizing modulation element, an energy splitting element and a light detecting and analyzing apparatus. The light receiving element is for receiving a target light. The first polarizing modulation element is rotatably connected to the light receiving element for generating a first polarized light. The second polarizing modulation element is rotatably connected to the first polarizing modulation element for generating a second polarized light. The energy splitting element receives the second polarized light so as to generate a modulated-polarization and energy-resolved light. The light detecting and analyzing apparatus receiving the polarization-modulated and energy-resolved light and retrieving the polarization information for the whole spectrum of the target light by an analyzing algorithm.

專利摘要(英)

An EUV spectroscopic polarimeter including a light receiving element, a first polarizing modulation element, a second polarizing modulation element, an energy splitting element and a light detecting and analyzing apparatus. The light receiving element is for receiving a target light. The first polarizing modulation element is rotatably connected to the light receiving element for generating a first polarized light. The second polarizing modulation element is rotatably connected to the first polarizing modulation element for generating a second polarized light. The energy splitting element receives the second polarized light so as to generate a modulated-polarization and energy-resolved light. The light detecting and analyzing apparatus receiving the polarization-modulated and energy-resolved light and retrieving the polarization information for the whole spectrum of the target light by an analyzing algorithm.

聯絡資訊
承辦人姓名	李曉琪
承辦人電話	03-5715131 #31061
承辦人Email	hsiaochi@mx.nthu.edu.tw