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專利授權區

專利授權區
專利名稱(中)	用於電子顯微鏡的測試樣品及其製作方法
專利家族	中華民國：I752679 大陸：CN114441561B 美國：US11227742B1
專利權人	國立清華大學 100.00%
發明人	陳健群
技術領域	材料化工,機械結構,光電光學,電子電機

專利摘要(中)
本发明提供一种用于电子显微镜的测试样品及其制作方法，该测试样品包含一承载基板、一待测物，及一保护层。该待测物设置于该承载基板上，该保护层由非晶形的氧化铝构成，披覆于该待测物上且厚度不大于5nm。本发明利用该保护层披覆于该待测物上，避免该待测物在电子显微镜的检测中因受到电子束的照射而毁损，亦减少积碳效应的发生。且该电子束的电子在非晶形的保护层中行进时，不会产生晶格绕射而不会对该待测物的分析及成像造成影响。

專利摘要(中)

本发明提供一种用于电子显微镜的测试样品及其制作方法，该测试样品包含一承载基板、一待测物，及一保护层。该待测物设置于该承载基板上，该保护层由非晶形的氧化铝构成，披覆于该待测物上且厚度不大于5nm。本发明利用该保护层披覆于该待测物上，避免该待测物在电子显微镜的检测中因受到电子束的照射而毁损，亦减少积碳效应的发生。且该电子束的电子在非晶形的保护层中行进时，不会产生晶格绕射而不会对该待测物的分析及成像造成影响。

專利摘要(英)
A test specimen for an electron microscope includes a carrier board, a test object and a protective layer. The test object is setup on the carrier board. The protective layer which is composed of amorphous aluminum oxide covers on the test object, and its thickness is not more than 5nm. The protective layer which covering on the test object can prevent the test object from being damaged by the electron beam during a detection of the electron microscope, and it also reduces the occurrence of carbon deposition effect. When the electron beam is transmitted through the protective layer, there is no lattice diffraction to affect an analysis and an imaging of the test object. Besides, this invention also provides a manufacturing method for the test specimen.

專利摘要(英)

A test specimen for an electron microscope includes a carrier board, a test object and a protective layer. The test object is setup on the carrier board. The protective layer which is composed of amorphous aluminum oxide covers on the test object, and its thickness is not more than 5nm. The protective layer which covering on the test object can prevent the test object from being damaged by the electron beam during a detection of the electron microscope, and it also reduces the occurrence of carbon deposition effect. When the electron beam is transmitted through the protective layer, there is no lattice diffraction to affect an analysis and an imaging of the test object. Besides, this invention also provides a manufacturing method for the test specimen.

聯絡資訊
承辦人姓名	楊美茹
承辦人電話	03-5715131 #62305
承辦人Email	mjyang2@mx.nthu.edu.tw