A test specimen for an electron microscope includes a carrier board, a test object and a protective layer. The test object is setup on the carrier board. The protective layer which is composed of amorphous aluminum oxide covers on the test object, and its thickness is not more than 5nm. The protective layer which covering on the test object can prevent the test object from being damaged by the electron beam during a detection of the electron microscope, and it also reduces the occurrence of carbon deposition effect. When the electron beam is transmitted through the protective layer, there is no lattice diffraction to affect an analysis and an imaging of the test object. Besides, this invention also provides a manufacturing method for the test specimen. |