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專利授權區
專利名稱(中) 熱致動振盪式懸浮微粒感測裝置及懸浮微粒感測方法
專利名稱(英) THERMAL-PIEZORESISTIVE OSCILLATOR-BASED AEROSOL SENSOR AND AEROSOL SENSING METHOD
專利家族 中華民國:I647435
美國:10,705,053
專利權人 國立清華大學 100%
發明人 劉廷淵,李昇憲
技術領域 機械結構,電子電機
專利摘要(中)
The present disclosure provides an aerosol sensing method. The aerosol sensing method includes steps of providing an entering process, providing a particle collecting process and providing a measuring process. The entering process is to allow an aerosol to enter a chamber of a thermal-piezoresistive oscillator-based aerosol sensor, and a thermal-piezoresistive resonator is disposed in the chamber. The particle collecting process is to allow particulate matters in the aerosol to land on at least one proof-mass of the thermal-piezoresistive resonator when the thermal-piezoresistive resonator is not driven. The measuring process is to use an electrical signal to drive the thermal-piezoresistive resonator and measure a resonant frequency of the thermal-piezoresistive resonator. The particle collecting process and the measuring process are operated in a repetitive cycle for measuring changes of the resonant frequency of the thermal-piezoresistive resonator to measure the particulate matters of the aerosol.
聯絡資訊
承辦人姓名 劉千綺
承辦人電話 03-571-5131 #31181
承辦人Email chienchi@mx.nthu.edu.tw
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