A micro-scale wireless heater includes: a support layer having first and second sides, and a cavity on the second side; a first electrode plate and a first conduction line disposed on the second side; a second electrode plate and a coil both embedded into a slot on the first side, the support layer being disposed between the first and second electrode plates forming a capacitor, the coil forms an inductor, and the slot communicates with the cavity; and a second conduction line disposed in the cavity. The first electrode plate is electrically connected to the second electrode plate through the first conduction line, the second conduction line and the coil in order. Three exposed surfaces of the second electrode plate, the coil and the first side are flush with one another. The inductor and the capacitor convert electromagnetic waves into heat. A fabrication method and applications of the heater are also provided. |