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專利授權區

專利授權區
專利名稱(中)	反射掃描式同調光繞射顯影方法及系統
專利名稱(英)	Reflective And Scanning Coherent Diffraction Imaging Method And System
專利家族	中華民國：I799345
專利權人	國立清華大學 100%
發明人	陳健群,陸平
技術領域	工業工程,光電光學

專利摘要(英)
In a reflective and scanning coherent diffraction imaging method and system, a two-dimensional photodetector detects the diffracted coherent light beams irradiated on a plurality of scanning positions of a sample under test and then reflected by the sample under test so as to obtain multiple two-dimensional diffraction data distributions. A processor transfers the two-dimensional diffraction data distributions into multiple two-dimensional intensity distributions in the reciprocal space using Fourier transformation, performs multiple generations of calculations based on a sample function, a light source function and the two-dimensional intensity distributions to obtained a reconstructed sample function, wherein, in each generation of calculations, multiple iteration calculations are performed according to a unique specific group order of the two-dimensional intensity distributions, and generates a three-dimensional reconstructed image of the surface topography of the sample under test based on the reconstructed sample function using a three-dimensional drawing application, thereby realizing there-dimensional image reconstruction with relatively higher accuracy and authenticity.

專利摘要(英)

In a reflective and scanning coherent diffraction imaging method and system, a two-dimensional photodetector detects the diffracted coherent light beams irradiated on a plurality of scanning positions of a sample under test and then reflected by the sample under test so as to obtain multiple two-dimensional diffraction data distributions. A processor transfers the two-dimensional diffraction data distributions into multiple two-dimensional intensity distributions in the reciprocal space using Fourier transformation, performs multiple generations of calculations based on a sample function, a light source function and the two-dimensional intensity distributions to obtained a reconstructed sample function, wherein, in each generation of calculations, multiple iteration calculations are performed according to a unique specific group order of the two-dimensional intensity distributions, and generates a three-dimensional reconstructed image of the surface topography of the sample under test based on the reconstructed sample function using a three-dimensional drawing application, thereby realizing there-dimensional image reconstruction with relatively higher accuracy and authenticity.

聯絡資訊
承辦人姓名	楊美茹
承辦人電話	03-5715131 #62305
承辦人Email	mjyang2@mx.nthu.edu.tw