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專利授權區
專利名稱(中)	多階感測元件
專利名稱(英)	MULTISTAGE SENSING DEVICE
專利家族	中華民國：I599764 美國：10,113,925
專利權人	國立清華大學 100.00%
發明人	賴威成,方維倫
技術領域	機械結構,電子電機

專利摘要(中)
A multistage sensing device includes a substrate, a deformable unit, and a sensor unit. The deformable unit has a first body disposed on the substrate, and a second body disposed on the first body and opposite to the substrate. The sensor unit includes a first sensor element and a second sensor element that are disposed in the deformable unit. The first sensor element is disposed between the second sensor element and the substrate. The second sensor element is operable to measure deformation of the second body when an external force is applied to the deformable unit. The first sensor element is operable to measure deformation of the first body when the first body is deformed by the deformation of the second body.

專利摘要(中)

A multistage sensing device includes a substrate, a deformable unit, and a sensor unit. The deformable unit has a first body disposed on the substrate, and a second body disposed on the first body and opposite to the substrate. The sensor unit includes a first sensor element and a second sensor element that are disposed in the deformable unit. The first sensor element is disposed between the second sensor element and the substrate. The second sensor element is operable to measure deformation of the second body when an external force is applied to the deformable unit. The first sensor element is operable to measure deformation of the first body when the first body is deformed by the deformation of the second body.

聯絡資訊
承辦人姓名	劉千綺
承辦人電話	03-571-5131 #31181
承辦人Email	chienchi@mx.nthu.edu.tw