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專利授權區
專利名稱(中)	用於電子顯微鏡的測試樣品及其製作方法
專利名稱(英)	Test specimen for electron microscope and manufacturing method thereof
專利家族	中華民國：I752679 大陸：CN114441561B 美國：US11227742B1
專利權人	國立清華大學 100.00%
發明人	陳健群,彭裕庭
技術領域	材料化工,機械結構,光電光學,電子電機

專利摘要(中)
一種用於電子顯微鏡的測試樣品，包含一承載基板、一待測物，及一保護層。該待測物設置於該承載基板上，該保護層由非晶形的氧化鋁構成，披覆於該待測物上且厚度不大於5nm。本發明利用該保護層披覆於該待測物上，避免該待測物在電子顯微鏡的檢測中因受到電子束的照射而毀損，亦減少積碳效應的發生。且該電子束的電子在非晶形的保護層中行進時，不會產生晶格繞射而不會對該待測物的分析及成像造成影響。此外，本發明還提供該測試樣品的製作方法。

專利摘要(中)

一種用於電子顯微鏡的測試樣品，包含一承載基板、一待測物，及一保護層。該待測物設置於該承載基板上，該保護層由非晶形的氧化鋁構成，披覆於該待測物上且厚度不大於5nm。本發明利用該保護層披覆於該待測物上，避免該待測物在電子顯微鏡的檢測中因受到電子束的照射而毀損，亦減少積碳效應的發生。且該電子束的電子在非晶形的保護層中行進時，不會產生晶格繞射而不會對該待測物的分析及成像造成影響。此外，本發明還提供該測試樣品的製作方法。

專利摘要(英)
A test specimen for an electron microscope includes a carrier board, a test object and a protective layer. The test object is setup on the carrier board. The protective layer which is composed of amorphous aluminum oxide covers on the test object, and its thickness is not more than 5nm. The protective layer which covering on the test object can prevent the test object from being damaged by the electron beam during a detection of the electron microscope, and it also reduces the occurrence of carbon deposition effect. When the electron beam is transmitted through the protective layer, there is no lattice diffraction to affect an analysis and an imaging of the test object. Besides, this invention also provides a manufacturing method for the test specimen.

專利摘要(英)

A test specimen for an electron microscope includes a carrier board, a test object and a protective layer. The test object is setup on the carrier board. The protective layer which is composed of amorphous aluminum oxide covers on the test object, and its thickness is not more than 5nm. The protective layer which covering on the test object can prevent the test object from being damaged by the electron beam during a detection of the electron microscope, and it also reduces the occurrence of carbon deposition effect. When the electron beam is transmitted through the protective layer, there is no lattice diffraction to affect an analysis and an imaging of the test object. Besides, this invention also provides a manufacturing method for the test specimen.

聯絡資訊
承辦人姓名	楊美茹
承辦人電話	03-5715131 #62305
承辦人Email	mjyang2@mx.nthu.edu.tw