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專利授權區

專利授權區
專利名稱(中)	光源生成裝置、光源生成方法以及相關的檢測系統
專利名稱(英)	LIGHT SOURCE GENERATION APPARATUS, LIGHT SOURCE GENERATING METHOD, AND RELATED DEFECT DETECTION SYSTEM
專利家族	PCT：WO2021251966A1(公開號) 中華民國：I749585 大陸：CN115699480A(公開號) 歐盟：4165739(公開號) 美國：2023-0136618(公開號) 韓國：10-2023-0023730(公開號)
專利權人	國立清華大學 100%
發明人	孔慶昌,黃旆齊,盧志軒,陳明彰
技術領域	光電光學,電子電機

專利摘要(英)
An extreme ultraviolet (EUV) light source generation apparatus includes a pump laser, at least one pulse shaping unit, a wavelength converting unit, and a high-order harmonics generation (HHG) unit. The pump laser is configured to provide a pulse laser radiation beam. Each of the at least one pulse shaping unit is configured to conduct at least one spectrum broadening operation and at least one phase compensation operation to the pulse laser radiation beam. The at least one phase compensation operation is configured to render multiple radiation beams having different frequencies of the pulse laser radiation beam received by the at least one pulse shaping unit in phase. The wavelength converting unit is configured to conduct a center wavelength conversion operation to the pulse laser radiation beam. The HHG unit is configured to receive the pulse laser radiation beam processed by the at least one spectrum broadening operation, the at least one phase compensation operation, and the center wavelength conversion operation, to generate a high-order harmonics radiation beam.

專利摘要(英)

An extreme ultraviolet (EUV) light source generation apparatus includes a pump laser, at least one pulse shaping unit, a wavelength converting unit, and a high-order harmonics generation (HHG) unit. The pump laser is configured to provide a pulse laser radiation beam. Each of the at least one pulse shaping unit is configured to conduct at least one spectrum broadening operation and at least one phase compensation operation to the pulse laser radiation beam. The at least one phase compensation operation is configured to render multiple radiation beams having different frequencies of the pulse laser radiation beam received by the at least one pulse shaping unit in phase. The wavelength converting unit is configured to conduct a center wavelength conversion operation to the pulse laser radiation beam. The HHG unit is configured to receive the pulse laser radiation beam processed by the at least one spectrum broadening operation, the at least one phase compensation operation, and the center wavelength conversion operation, to generate a high-order harmonics radiation beam.

聯絡資訊
承辦人姓名	李曉琪
承辦人電話	03-5715131 #31061
承辦人Email	hsiaochi@mx.nthu.edu.tw