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專利授權區

專利授權區
專利名稱(中)	光源生成裝置、光源生成方法以及相關的檢測系統
專利名稱(英)	LIGHT SOURCE GENERATION APPARATUS, LIGHT SOURCE GENERATING METHOD, AND RELATED DEFECT DETECTION SYSTEM
專利家族	PCT：WO2021251966A1(公開號) 中華民國：I749585 大陸：CN115699480A(公開號) 歐盟：4165739 美國：12,191,621 韓國：10-2023-0023730(公開號)
專利權人	國立清華大學 100.00%
發明人	孔慶昌,黃旆齊,盧志軒,陳明彰
技術領域	光電光學,電子電機

專利摘要(中)
極紫外光輻射光源生成裝置包含泵浦源、至少一塑形單元、波長轉換單元、以及高階諧波生成單元。泵浦源用以提供脈衝雷射輻射光束。至少一塑形單元用以對脈衝雷射輻射光束進行展頻操作與相位補償操作。相位補償操作用以使至少一塑形單元接收到之脈衝雷射輻射光束中多個頻率成分的相位一致。波長轉換單元用以對脈衝雷射輻射光束進行中心波長轉換操作。高階諧波生成單元用以接收經過展頻操作、相位補償操作、以及中心波長轉換操作的脈衝雷射輻射光束，以產生高階諧波輻射光束。

專利摘要(中)

極紫外光輻射光源生成裝置包含泵浦源、至少一塑形單元、波長轉換單元、以及高階諧波生成單元。泵浦源用以提供脈衝雷射輻射光束。至少一塑形單元用以對脈衝雷射輻射光束進行展頻操作與相位補償操作。相位補償操作用以使至少一塑形單元接收到之脈衝雷射輻射光束中多個頻率成分的相位一致。波長轉換單元用以對脈衝雷射輻射光束進行中心波長轉換操作。高階諧波生成單元用以接收經過展頻操作、相位補償操作、以及中心波長轉換操作的脈衝雷射輻射光束，以產生高階諧波輻射光束。

專利摘要(英)
An extreme ultraviolet (EUV) light source generation apparatus includes a pump laser, at least one pulse shaping unit, a wavelength converting unit, and a high-order harmonics generation (HHG) unit. The pump laser is configured to provide a pulse laser radiation beam. Each of the at least one pulse shaping unit is configured to conduct at least one spectrum broadening operation and at least one phase compensation operation to the pulse laser radiation beam. The at least one phase compensation operation is configured to render multiple radiation beams having different frequencies of the pulse laser radiation beam received by the at least one pulse shaping unit in phase. The wavelength converting unit is configured to conduct a center wavelength conversion operation to the pulse laser radiation beam. The HHG unit is configured to receive the pulse laser radiation beam processed by the at least one spectrum broadening operation, the at least one phase compensation operation, and the center wavelength conversion operation, to generate a high-order harmonics radiation beam.

專利摘要(英)

An extreme ultraviolet (EUV) light source generation apparatus includes a pump laser, at least one pulse shaping unit, a wavelength converting unit, and a high-order harmonics generation (HHG) unit. The pump laser is configured to provide a pulse laser radiation beam. Each of the at least one pulse shaping unit is configured to conduct at least one spectrum broadening operation and at least one phase compensation operation to the pulse laser radiation beam. The at least one phase compensation operation is configured to render multiple radiation beams having different frequencies of the pulse laser radiation beam received by the at least one pulse shaping unit in phase. The wavelength converting unit is configured to conduct a center wavelength conversion operation to the pulse laser radiation beam. The HHG unit is configured to receive the pulse laser radiation beam processed by the at least one spectrum broadening operation, the at least one phase compensation operation, and the center wavelength conversion operation, to generate a high-order harmonics radiation beam.

聯絡資訊
承辦人姓名	李曉琪
承辦人電話	03-5715131 #31061
承辦人Email	hsiaochi@mx.nthu.edu.tw