In a 3D imaging method and system for light element thin films, a processor repeatedly performs a 3D image reconstruction procedure multiple times, based on multiple reference images, and multiple 3D images, which are obtained after preprocessing multiple original projection images of a film sample captured by an STEM at different angles where the film sample is located in relation to noise removal, field correction and background subtraction. In each procedure, these 2D images are subjected to alignment processing and multiple iterative calculations in reciprocal space to obtain corresponding reconstructed 3D image data about a tested area of the film sample. The reference images used in each procedure except the first procedure are extracted from the reconstructed 3D image data obtained in the previous procedure. The 3D reconstructed image of the tested area of the film sample is generated based on the reconstructed 3D image data obtained in the last procedure, and is thus displayed by a display module. |