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專利名稱(中) 用於輕元素薄膜的三維影像重建方法及系統
專利名稱(英) Three-dimensional image reconstruction method and system for light element thin films
專利家族 中華民國:I783896
美國:US11830122B2
專利權人 國立清華大學 100.00%
發明人 陳健群
技術領域 材料化工,光電光學
專利摘要(中)
一種用於輕元素薄膜的三維影像重建方法及系統中,處理器根據由STEM在薄膜樣品處於不同角度下拍攝的原始投影影像進行有關於除噪、視場修正和背景扣除的預處理後所獲得的多個二維影像和多個參考影像執行多次的三維影像重建程序,在每次的程序中該等二維影像經過校準處理和在倒空間的多次迭代演算而獲得有關於受測區域的對應的三維重建影像資料,除了第一次以外的每一次程序中所用的參考影像是從前一次程序所獲得的三維重建影像資料擷取出,並根據最後一次程序獲得的三維重建影像資料生成該受測區域的三維重建影像,以供顯示模組顯示。
專利摘要(英)
In a 3D imaging method and system for light element thin films, a processor repeatedly performs a 3D image reconstruction procedure multiple times, based on multiple reference images, and multiple 3D images, which are obtained after preprocessing multiple original projection images of a film sample captured by an STEM at different angles where the film sample is located in relation to noise removal, field correction and background subtraction. In each procedure, these 2D images are subjected to alignment processing and multiple iterative calculations in reciprocal space to obtain corresponding reconstructed 3D image data about a tested area of the film sample. The reference images used in each procedure except the first procedure are extracted from the reconstructed 3D image data obtained in the previous procedure. The 3D reconstructed image of the tested area of the film sample is generated based on the reconstructed 3D image data obtained in the last procedure, and is thus displayed by a display module.
聯絡資訊
承辦人姓名 楊美茹
承辦人電話 03-5715131 #62305
承辦人Email mjyang2@mx.nthu.edu.tw
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