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專利授權區
專利名稱(中) 加速度感測結構及加速度感測器
專利名稱(英) ACCELERATION SENSING STRUCTURE AND ACCELEROMETER
專利家族 中華民國:I765232
美國:US 11,287,440 B2
專利權人 國立清華大學 100.00%
發明人 李昇憲,羅傑斯,嘉佳,翁健豪
技術領域 機械結構,電子電機
專利摘要(中)
本發明提供一種加速度感測結構,其包含一基架、一質量塊、一平衡環及至少二外彈性臂。質量塊懸掛於基架,質量塊具有一第一厚度,平衡環環繞且連接質量塊,平衡環具有一第二厚度;各外彈性臂分別連接於平衡環與基架之間,前述至少二外彈性臂對稱排列。其中,第二厚度大於等於0.5倍的第一厚度且小於等於第一厚度,且質量塊運動時,連動至少二外彈性臂變形。藉此,可提升加速度感測結構的性能。
專利摘要(英)
The present disclosure provides an acceleration sensing structure including a base frame, a proof mass, a gimbal and at least two outer flexible arms. The proof mass is suspended from the base frame and has a first thickness. The gimbal connects and surrounds the proof mass. The gimbal has a second thickness. Each of the at least two outer flexible arms are connected between the gimbal and the base frame, and the at least two outer flexible arms are arranged symmetrically. The second thickness is larger than or equal to one-half of the first thickness and is smaller than or equal to the first thickness. When the proof mass is moved, the gimbal and the at least two outer flexible arms deform. Therefore, the performance of the acceleration sensing structure can be improved.
聯絡資訊
承辦人姓名 劉千綺
承辦人電話 03-571-5131 #31181
承辦人Email chienchi@mx.nthu.edu.tw
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