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專利授權區

專利授權區
專利名稱(中)	微機電共振器之主動式溫度補償方法及其共振器
專利名稱(英)	MEMS RESONATOR ACTIVE TEMPERATURE COMPENSATION METHOD AND THERMALLY-ACTUATED MEMS RESONATOR
專利家族	中華民國：I538396 美國：9,630,830
專利權人	國立清華大學 100%
發明人	陳政吉,李昇憲
技術領域	通信傳輸,機械結構,電子電機

專利摘要(中)
A MEMS resonator active temperature compensation method is provided. The MEMS resonator active temperature compensation method includes: a MEMS resonator is provided, wherein a structural resistance of the MEMS resonator is varied with an environmental temperature; a structural resistance shift value is formed by a variation of the environmental temperature; an electrical circuit is provided, wherein the electrical circuit is electrically connected with the MEMS resonator for providing an adjustment mechanism to the MEMS resonator; and a compensation value is provided from the adjustment mechanism for controlling the structural resistance shift value.

專利摘要(中)

A MEMS resonator active temperature compensation method is provided. The MEMS resonator active temperature compensation method includes: a MEMS resonator is provided, wherein a structural resistance of the MEMS resonator is varied with an environmental temperature; a structural resistance shift value is formed by a variation of the environmental temperature; an electrical circuit is provided, wherein the electrical circuit is electrically connected with the MEMS resonator for providing an adjustment mechanism to the MEMS resonator; and a compensation value is provided from the adjustment mechanism for controlling the structural resistance shift value.

聯絡資訊
承辦人姓名	劉千綺
承辦人電話	03-571-5131 #31181
承辦人Email	chienchi@mx.nthu.edu.tw