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專利授權區
專利名稱(中)	壓電式傳感元件及其製作方法
專利名稱(英)	Piezoelectric transducer device and manufacturing method thereof
專利家族	中華民國：202450450(公開號)
專利權人	國立清華大學 100.00%
發明人	賴育晟,馮國華
技術領域	機械結構,電子電機

專利摘要(中)
一種壓電式傳感元件，包含一由矽材料構成並具有至少一空腔的支撐基板、一壓電單元、一由負型光阻材料構成的接合層，及一由導電材料構成的電連接單元。該壓電單元具有一由鈦金屬構成的箔板、二以水熱法形成的壓電層，及一自該壓電單元反向於該支撐基板的一面向下形成的開口，使該箔板對外露出。該電連接單元具有一頂電極及一與該箔板連接的連接埠，使該箔板能同時作為該壓電單元的支撐結構及一底電極，使元件達到輕量化，利用該接合層黏接該壓電單元與支撐基板，能避免該支撐基板於水熱法過程中毀損。此外，本案還提供該壓電式傳感元件的製作方法。

專利摘要(中)

一種壓電式傳感元件，包含一由矽材料構成並具有至少一空腔的支撐基板、一壓電單元、一由負型光阻材料構成的接合層，及一由導電材料構成的電連接單元。該壓電單元具有一由鈦金屬構成的箔板、二以水熱法形成的壓電層，及一自該壓電單元反向於該支撐基板的一面向下形成的開口，使該箔板對外露出。該電連接單元具有一頂電極及一與該箔板連接的連接埠，使該箔板能同時作為該壓電單元的支撐結構及一底電極，使元件達到輕量化，利用該接合層黏接該壓電單元與支撐基板，能避免該支撐基板於水熱法過程中毀損。此外，本案還提供該壓電式傳感元件的製作方法。

專利摘要(英)
A piezoelectric transducer device includes a supporting substrate composing of silicon and having a cavity, a piezoelectric unit, a connecting layer and an electrical connecting unit. The piezoelectric unit involves a titanium foil, two piezoelectric layers fabricated by hydrothermal process, and a opening which forms on the side of the piezoelectric unit opposite to the supporting substrate and makes the titanium foil exposed. The electrical connecting unit involves a top electrode and a contact pad which electrically connects to the titanium foil, so that the titanium foil can be used as a supporting structure and a bottom electrode, and the piezoelectric transducer device can be reduced in weight. Moreover, connecting the supporting substrate and the piezoelectric unit by the connecting layer can prevent the supporting substrate from damaging during the hydrothermal process. Besides, this invention provides a fabricating method for the piezoelectric transducer device.

專利摘要(英)

A piezoelectric transducer device includes a supporting substrate composing of silicon and having a cavity, a piezoelectric unit, a connecting layer and an electrical connecting unit. The piezoelectric unit involves a titanium foil, two piezoelectric layers fabricated by hydrothermal process, and a opening which forms on the side of the piezoelectric unit opposite to the supporting substrate and makes the titanium foil exposed. The electrical connecting unit involves a top electrode and a contact pad which electrically connects to the titanium foil, so that the titanium foil can be used as a supporting structure and a bottom electrode, and the piezoelectric transducer device can be reduced in weight. Moreover, connecting the supporting substrate and the piezoelectric unit by the connecting layer can prevent the supporting substrate from damaging during the hydrothermal process. Besides, this invention provides a fabricating method for the piezoelectric transducer device.

聯絡資訊
承辦人姓名	劉千綺
承辦人電話	03-571-5131 #31181
承辦人Email	chienchi@mx.nthu.edu.tw