![]() |
|
---|---|
專利名稱(中) | 微型常閉式結構及其製作方法 |
專利名稱(英) | Micro Normally-closed Structure and Method for Manufacturing the same |
專利家族 |
美國:10,077,185 |
專利權人 | 國立清華大學 100.00% |
發明人 | 賴威成,方維倫 |
技術領域 | 機械結構,電子電機 |
![]() |
---|
The present invention relates to a micro normally-closed structure, which is manufactured by a MEMS process and used as a MEMS component. The structure includes a base and a fixed contact; and a flexible arm including a first end and a movable contact, wherein the first end is electrically connecting to the base, and remaining a normally closed electrically conducting state between the movable contact and the fix end. |
![]() |
|
---|---|
承辦人姓名 | 劉千綺 |
承辦人電話 | 03-571-5131 #31181 |
承辦人Email | chienchi@mx.nthu.edu.tw |