A method and system for utilizing the laser defocusing effect for phase matching of high order harmonic generation in a tight focusing geometry are provided. The most suitable focusing geometry, especially those five parameters including: (1) the aperture size of the adjustable iris, (2) the focus position with respect to the gas cell, (3) the backing pressure of the gas cell, (4) the focal length and (5) the length of the gas cell, for achieving phase matching of the target harmonic order and maximal yield of the target harmonic order are disclosed. |