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專利名稱(中) 合金膜結晶織構誘導方法及其結構
專利名稱(英) TEXTURE INDUCING STRUCTURE FOR ALLOY FILMS AND TEXTURE INDUCING METHOD THEREOF
專利家族 中華民國:I626162
美國:10,580,558 B2
專利權人 國立清華大學 100%
發明人 金重勳,張禎元,蕭恆昇,蕭祺儒
技術領域 材料化工
專利摘要(中)
A texture inducing structure for alloy films is provided. The texture inducing structure includes a substrate, a texture-inducing layer and a deposition layer. The texture-inducing layer is formed on the substrate. The texture-inducing layer has an intrinsically strong crystalline texture, a texture coefficient of the texture-inducing layer is greater than 2, and a thickness of the texture-inducing layer is ranged from 0.1 µm to 6 µm. The deposition layer is formed on the texture-inducing layer. A texture of the deposition layer is induced by the texture-inducing layer thereby changing the magnetic anisotropy and the magnetic strength of the deposition layer, a thickness of the deposition layer is ranged from 1 µm ~ 60 µm, and the thickness of the deposition layer is greater than that of the texture-inducing layer.
聯絡資訊
承辦人姓名 劉千綺
承辦人電話 03-571-5131 #31181
承辦人Email chienchi@mx.nthu.edu.tw
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