專利授權區 | |
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專利名稱(英) | METHOD FOR TESTING THROUGH-SILICON-VIA |
專利家族 |
美國:8,937,486 |
專利權人 | 國立清華大學 100% |
發明人 | 蒯定明,陳柏源,吳誠文,周永發 |
技術領域 | 電子電機 |
專利摘要(英) |
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A method for testing a TSV comprises charging a through-silicon-via under test to a first predetermined voltage level charging a capacitance device to a second predetermined voltage level; performing charge-sharing between the through-silicon-via and the capacitance device; and determining that the through-silicon-via under test is not faulty if the voltage level of the through-silicon-via after the charge-sharing step is within a predetermined range. |
聯絡資訊 | |
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承辦人姓名 | 李曉琪 |
承辦人電話 | 03-5715131 #31061 |
承辦人Email | hsiaochi@mx.nthu.edu.tw |