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專利授權區

專利授權區
專利名稱(中)	微機電共振器及其訊號處理方法以及製造方法
專利名稱(英)	MEMS RESONATOR, MANUFACTORING METHOD THEREOF, AND SIGNAL PROCESSING METHOD USING MEMS RESONATOR
專利家族	中華民國：I519066 美國：8,854,149
專利權人	國立清華大學 100.00%
發明人	李承勳,李昇憲
技術領域	通信傳輸,機械結構,電子電機

專利摘要(中)
A capacitively-driven Micro-Electro-Mechanical System (MEMS) resonator is provided, in which a piezoresistively differential measurement is used to enable the MEMS resonator to transfer a signal. The MEMS resonator uses a Complementary Metal-Oxide-Semiconductor (CMOS) manufacturing process to make its oscillator and piezoresistor to achieve electrical insulation, thereby lowering the level of feedthrough signal.

專利摘要(中)

A capacitively-driven Micro-Electro-Mechanical System (MEMS) resonator is provided, in which a piezoresistively differential measurement is used to enable the MEMS resonator to transfer a signal. The MEMS resonator uses a Complementary Metal-Oxide-Semiconductor (CMOS) manufacturing process to make its oscillator and piezoresistor to achieve electrical insulation, thereby lowering the level of feedthrough signal.

聯絡資訊
承辦人姓名	劉千綺
承辦人電話	03-571-5131 #31181
承辦人Email	chienchi@mx.nthu.edu.tw