搜尋專利授權區
關鍵字
選單
專利授權區


專利授權區
專利名稱(中) 具有結晶矽薄膜之基板及其製備方法
專利名稱(英) SUBSTRATE WITH CRYSTALLIZED SILICON FILM AND MANUFACTURING METHOD THEROF
專利家族 中華民國:I519668
美國:9,443,924
專利權人 國立清華大學 100%
發明人 李紫原,謝秉諺,戴念華
技術領域 材料化工,光電光學,電子電機
專利摘要(中)
The present invention relates to a substrate with a crystallized silicon film and manufacturing method thereof, wherein the substrate with the crystallized silicon film comprises: a substrate, which is a polymer substrate; and a crystallized silicon film, which is formed on at least one surface of the substrate, wherein the crystallized silicon film comprises a plurality of silicon crystals with column structures, and the crystallinity of the crystallized silicon film is higher than 90%.
聯絡資訊
承辦人姓名 李佳玲
承辦人電話 03-5715131 #62300
承辦人Email cl.lee@mx.nthu.edu.tw
我有興趣 BACK