This invention discloses a structure of a planar MOS-gated semiconductor device, comprising an active region and a non -active region. The active region includes multiple hexagonal active region units, which are arranged closely adjacent to each other to cover the active region and form the plane of the active region. Wherein, the hexagonal active region units surround the non -active region, and at least one of the hexagonal active region units is connected to the non-active region unit. The active region includes a channel for med by the metal oxide semiconductor structure inversion, while the non-active region does not include a channel. |